Relation of initial thin film formation to defects induced by low energy ions

Author： Durand H.-A.   Sekine K.   Etoh K.   Ito K.   Kataoka I.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 42-48

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