Microstructure analyses of the titanium films formed by the ionized sputtering process

Author： Ko D.-H.   Kim E.-H.   Choi S.   Yoo B.-Y.   Lee H.-D.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.340, Iss.1, 1999-02, pp. : 13-17

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