Thermal stability of TiN/AlN superlattices

Author: Setoyama M.   Irie M.   Ohara H.   Tsujioka M.   Takeda Y.   Nomura T.   Kitagawa N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 126-131

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Abstract