Structure and microtribological behavior of Teflon and Teflon/Si 3 N 4 micro-assembling film

Author: Wang J.   Lu X.   Wen S.   Li H.   Wang L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.342, Iss.1, 1999-03, pp. : 291-296

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Abstract