Author： Mitsuda Y. Kobayashi K.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 55-59
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Effect of nitrogen on diamond growth using unconventional gas mixtures
By Hong T.-M. Chiou Y.-S. Chen C.-F. Chen S.-H.
Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. :
Access to resources
Recommend
Effect of H2 Carrier Gas on CVD Growth Rate for 4H-SiC Trench Filling
Materials Science Forum, Vol. 2016, Iss. 858, 2016-06 ,pp. :
Investigations of the gas phase mechanism of diamond deposition in combustion CVD
By Kohse-Hoinghaus K. Lowe A. Atakan B.
Thin Solid Films, Vol. 368, Iss. 2, 2000-06 ,pp. :
Phase diagrams for CVD diamond deposition from halogen-containing gas phase
By Liu Z.-J. Zhang D.W. Zhang J.-Y. Wan Y.-Z. Wang J.-T.
Thin Solid Films, Vol. 342, Iss. 1, 1999-03 ,pp. :