Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

Author: Strass A.   Bieringer P.   Hansch W.   Fuenzalida V.   Alvarez A.   Luna J.   Martil I.   Martinez F.L.   Eisele I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 135-146

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Abstract