Depth dependence of stress and porosity in porous silicon: a micro-Raman study

Author： Papadimitriou D.   Bitsakis J.   Lopez-Villegas J.M.   Samitier J.   Morante J.R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 293-297

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