Effect of oxygen content and thickness of sputtered RuO x electrodes on the ferroelectric and fatigue properties of sol-gel PZT thin films

Author： Law C.W. Tong K.Y. Li J.H. Li K. Poon M.C.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 162-168

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