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Elsevier

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Double-layer anti-reflection coating using MgF 2 and CeO 2 films on a crystalline silicon substrate

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K-M-S (keep-molecules sputtering) deposition of optical MgF 2 thin films

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Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition

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