Thickness dependence of the optical properties of sputter deposited Ti oxide films

Author: Rodrguez J.   Gomez M.   Ederth J.   Niklasson G.A.   Granqvist C.G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.1, 2000-04, pp. : 119-125

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Abstract