Lattice Monte Carlo models of thin film deposition

Author: Gilmer G.H.   Huang H.   de la Rubia T.D.   Dalla Torre J.   Baumann F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.2, 2000-04, pp. : 189-200

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Abstract