Author: Zhou Z.F. Bello I. Kremnican V. Fung M.K. Lai K.H. Li K.Y. Lee C.S. Lee S.T.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.368, Iss.2, 2000-06, pp. : 292-296
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Reduction of intrinsic stress in cubic boron nitride films
By Ullmann J. Kellock A.J. Baglin J.E.E.
Thin Solid Films, Vol. 341, Iss. 1, 1999-03 ,pp. :
Study on stress and strain of cubic boron nitride thin films
By Zhang X. Yue J. Chen G. Yan H.
Thin Solid Films, Vol. 315, Iss. 1, 1998-03 ,pp. :
Parameter spaces for the nucleation and the subsequent growth of cubic boron nitride films
Thin Solid Films, Vol. 423, Iss. 2, 2003-01 ,pp. :