Structural studies and influence of the structure on the electrical and optical properties of microcrystalline silicon thin films produced by RF sputtering

Author： Cerqueira M.F.   Ferreira J.A.   Adriaenssens G.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 128-136

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