Characterization of titanium dioxide atomic layer growth from titanium ethoxide and water

Author： Aarik J.   Aidla A.   Sammelselg V.   Uustare T.   Ritala M.   Leskela M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 163-172

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