Density functional study of silane adsorption onto Si(100) surface

Author: Lin J.S.   Kuo Y.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 192-198

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract