High temperature cracking of tungsten polycide films on quartz substrate

Author: Lee J.   Oh S.-H.   Lee J.   Lee E.   Lim I.   Park W.-K.   Kim G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.370, Iss.1, 2000-07, pp. : 307-310

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Abstract