Preparation of Zn 1-x Mg x O films by radio frequency magnetron sputtering

Author： Minemoto T. Negami T. Nishiwaki S. Takakura H. Hamakawa Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.372, Iss.1, 2000-09, pp. : 173-176

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