The effect of oxygen-to-argon ratio on the electrical and reliability characteristics of sputtered Sr 0.8 Bi 2.5 Ta 1.2 Nb 0.9 O 9+x thin films

Author: Tsai M.S.   Tseng T.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.372, Iss.1, 2000-09, pp. : 190-199

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Abstract