Microwave plasma characteristics in steel nitriding process

Author: Camps E.   Becerril F.   Muhl S.   Alvarez-Fregoso O.   Villagran M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 293-298

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Abstract