Growth kinetics of sputtered amorphous carbon thin films: composition studies and phenomenological model

Author: Logothetidis S.   Patsalas P.   Gioti M.   Galdikas A.   Pranevicius L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.376, Iss.1, 2000-11, pp. : 56-66

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Abstract