Characterization of TiAlN films deposited by reactive pulsed laser ablation

Author： Acquaviva S. D'Anna E. Elia L. Fernandez M. Leggieri G. Luches A. Martino M. Mengucci P. Zocco A.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.379, Iss.1, 2000-12, pp. : 45-49

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