Selective deposition and micropatterning of titanium dioxide thin film on self-assembled monolayers

Author： Masuda Y.   Sugiyama T.   Lin H.   Seo W.S.   Koumoto K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 153-157

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