Dry etching characteristics of ITO thin films deposited on plastic substrates

Author: Lee Y.J.   Bae J.W.   Han H.R.   Kim J.S.   Yeom G.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 281-283

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Abstract