Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films

Author： Endle J.P.   Sun Y.-M.   Nguyen N.   Madhukar S.   Hance R.L.   White J.M.   Ekerdt J.G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 126-133

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