The effect of ZrO 2 buffer layer on electrical properties in Pt/SrBi 2 Ta 2 O 9 /ZrO 2 /Si ferroelectric gate oxide structure

Author: Choi H.S.   Kim E.H.   Choi I.-H.   Kim Y.T.   Choi J.H.   Lee J.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.388, Iss.1, 2001-06, pp. : 226-230

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Abstract