A study of the dielectric characteristics of aluminum oxide thin films deposited by spray pyrolysis from Al(acac) 3

Author： Aguilar-Frutis M.   Garcia M.   Falcony C.   Plesch G.   Jimenez-Sandoval S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 200-206

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