Stoichiometry and thickness distribution of BaCuO 2 and CaCuO 2 thin films by off-axis RF sputtering

Author： Nie J.C.   Sundaresan A.   Hayashi A.K.   Ishiura Y.   Ihara H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 261-266

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