Ar stabilisation of the cubic/tetragonal phases of ZrO 2 in thin films prepared by ion beam induced chemical vapour deposition

Author: Holgado J.P.   Espinos J.P.   Yubero F.   Justo A.   Ocana M.   Bentez J.   Gonzalez-Elipe A.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 34-42

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