Anomalous RF sputtering in a high magnetic field: the effect of high magnetic fields on the growth of Fe-Si-O films

Author： Bai H.L.   Mitani S.   Wang Z.J.   Fujimori H.   Motokawa M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 51-55

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