Low-temperature deposition of highly [100]-oriented MgO films using charged liquid cluster beam

Author: Rhee S.H.   Yang Y.   Choi H.S.   Myoung J.M.   Kim K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.396, Iss.1, 2001-09, pp. : 23-28

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Abstract