Surface studies of carbon films from pyrolyzed photoresist

Author: Kostecki R.   Schnyder B.   Alliata D.   Song X.   Kinoshita K.   Kotz R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.396, Iss.1, 2001-09, pp. : 36-43

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Abstract