Effect of process pressure on diamond-like carbon deposited using electron cyclotron resonance chemical vapor deposition

Author: Yoon S.F.   Tan K.H.   Rusli   Ahn J.   Huang Q.F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.396, Iss.1, 2001-09, pp. : 62-68

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