Microstructural evolution and electrical property of Ta-doped SnO 2 films grown on Al 2 O 3 (0001) by metalorganic chemical vapor deposition

Author: Kim Y.-W.   Lee S.W.   Chen H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.405, Iss.1, 2002-02, pp. : 256-262

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Abstract