Fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer: accurate calibration method, effect of errors and testing

Author: En Naciri A.   Broch L.   Johann L.   Kleim R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 103-112

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Abstract