Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

Author: Aoqui S.-i.   Miyata H.   Ohshima T.   Ikegami T.   Ebihara K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 126-131

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Abstract