Decomposition behaviors of bis(N-alkoxy-p-ketoiminate) titanium complexes in the depositions of titanium oxide and barium strontium titanate films

Author： Hong S.H.   Rim S.K.   Lee I.-M.   Min Y.S.   Kim D.   Lee W.I.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 82-87

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