Fabrication and characterization of aluminum oxide/chromium oxide superlattice for attenuated phase-shifting mask working at 193 nm wavelength

Author: Lai F.D.   Wang L.A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.409, Iss.2, 2002-04, pp. : 220-226

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Abstract