Sensitivity of SrBi 2 Ta 2 O 9 capacitors to materials and annealing processes in upper electrode formation

Author: Ohfuji S.-i.   Itsumi M.   Ogawa S.   Shinojima H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 274-279

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Abstract