Ion plating discharges: evidence of cluster formation during metal evaporation

Author: Davison A.   Wilson A.D.   Avelar-Batista J.C.   Leyland A.   Matthews A.   Fancey K.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.414, Iss.1, 2002-07, pp. : 7-12

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Abstract