Ultra-thin aluminum oxide as a thermal oxidation barrier on metal films

Author: Gan L.   Gomez R.D.   Castillo A.   Chen P.J.   Powell C.J.   Egelhoff Jr. W.F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 219-223

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Abstract