Chemical vapor deposition of Pb(Zr x Ti 1-x )O 3 films by Pb(C 2 H 5 ) 4 , Ti(i-OC 3 H 7 ) 4 , Zr(t-OC 4 H 9 ) 4 and O 2 : role of lead oxide formation from Pb(C 2 H 5 ) 4 and O 2 on film properties

Author： Cheng W.Y.   Hong L.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 94-100

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