Residual stress and thermal stability of the Fe-Ni-Cr/Invar bimetal membrane used for microactuation

Author： Hsu Y.-J.   Chang Y.-H.   Chai Y.-L.   Chen G.-J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.418, Iss.2, 2002-10, pp. : 189-196

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