Room-temperature deposition of Al-doped ZnO films by oxygen radical-assisted pulsed laser deposition

Author: Matsubara K.   Fons P.   Iwata K.   Yamada A.   Niki S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.422, Iss.1, 2002-12, pp. : 176-179

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Abstract