High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties

Author： Atanassova E.   Kalitzova M.   Zollo G.   Paskaleva A.   Peeva A.   Georgieva M.   Vitali G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 191-199

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