Doping impurity distribution and crystal quality evaluation of AlGaAs:Si films (0.22

Author: Fedorenko Y.   Jouhti T.   Konttinen J.   Likonen J.   Pessa M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.428, Iss.1, 2003-03, pp. : 181-184

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Abstract