Structure and morphological study of nanometer W and W 3 O thin films

Author: Maille L.   Sant C.   Le Paven-Thivet C.   Legrand-Buscema C.   Garnier P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.428, Iss.1, 2003-03, pp. : 237-241

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Abstract