Microsensor based on low temperature cofired ceramics and gas-sensitive thin film

Author： Pisarkiewicz T.   Sutor A.   Potempa P.   Maziarz W.   Thust H.   Thelemann T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.436, Iss.1, 2003-07, pp. : 84-89

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