Molecular-scale growth of silicon oxide on polymer substrate through vacuum ultraviolet light-assisted photooxidation of organosilane precursor

Author： Hozumi A.   Inagai H.   Yokogawa Y.   Kameyama T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.437, Iss.1, 2003-08, pp. : 89-94

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