Miniature drumheads: microfabricated ultrasonic transducers

Author: Ladabaum I.   Jin X.C.   Khuri-Yakub B.T.  

Publisher: Elsevier

ISSN: 0041-624X

Source: Ultrasonics, Vol.36, Iss.1, 1998-02, pp. : 25-29

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Abstract