The constructive procedure for solving the problems of electron transport in the multi-layer specimens for the normally incident electron beam. 1. Solution of the model transport equations for a point beam: Energy and charge deposition

Author： Maglevanny I.   Smolar V.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.46, Iss.11, 1995-11, pp. : 1261-1269

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